Preparation of Nanometer Porous Silicon by Chemical Etching Method and Its Surface Morphology Characterization

CHEN Xue-fei;LIU Yu-cun;CHAI Tao;YUAN Jun-ming

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    Published By: Chinese Journal of Explosives & Propellants

    CN 61-1310/TJ

Chinese Journal of Explosives & Propellants ›› 2012, Vol. 35 ›› Issue (6) : 86-88.

Preparation of Nanometer Porous Silicon by Chemical Etching Method and Its Surface Morphology Characterization

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