强电磁脉冲对硅微惯性传感器的损伤效应研究
沈杰;潘绪超;方中;何勇;陈鸿;张江南;史云雷
Damage Effect of Strong Electromagnetic Pulse on Micro-silicon Inertial Sensor
SHEN Jie;PAN Xuchao;FANG Zhong;HE Yong;CHEN Hong;ZHANG Jiangnan;SHI Yunlei
兵工学报
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2020, (6): 1157
-1164
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DOI: 10.3969/j.issn.1000-1093.2020.06.012
