材底温度对中频磁控溅射ZnO:Al透明导电薄膜性能的影响
黄宇;熊强;薛俊明;马铁华;孙建;赵颖;耿新华
Substrate Temperature Dependence of the Properties 01 ZnO：Al Thin Films Prepared by Mid-frequency Sputtering
HUANG YU;XIONG-QIANG;XUE-JUNMING;MA Tie-hua;SUN Jian;ZHAO Ying;GENG Xin-hua
兵工学报
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2006, (5): 891
-894
.
DOI: 10.3969/j.issn.1000-1093.2006.05.027
