Projection lithographic objective lens with sub-ten micrometerline-width and its MTF experimental measurements

LEI Liang;LI Lang-lin;YUAN Wei;LIU Xin;ZHOU Jin-yun

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2014, Vol. 35 ›› Issue (2) : 311-315.

Projection lithographic objective lens with sub-ten micrometerline-width and its MTF experimental measurements

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