Micro-nano fabrication of femtosecond laser wet etch

CHEN Feng;YANG Qing;BIAN Hao;DU Guang-qing;LIU Ke-yin;MENG Xiang-wei;DENG Ze-fang;SHAN Chao

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2014, Vol. 35 ›› Issue (1) : 150-154.

Micro-nano fabrication of femtosecond laser wet etch

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