Restoration of degraded edge in size measurement based on CCD image

LIU Bin;WANG Li-ming;ZHAO Xia

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2013, Vol. 34 ›› Issue (6) : 995-999.

Restoration of degraded edge in size measurement based on CCD image

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