PVD Si coatings on large-aperture SiC mirror for surface-modification

WANG Jian-jun;YUAN Lü-jun;WU Zhong-hua;ZHOU Xin

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2013, Vol. 34 ›› Issue (5) : 854-859.

PVD Si coatings on large-aperture SiC mirror for surface-modification

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