Effect of substrate temperature on alumina thin films prepared by electron beam evaporation

WANG Song-lin;YANG Chong-min;ZHANG Jian-fu;LIU Qing-long;LI Ming;MI Gao-yuan;WANG Hui-na

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2013, Vol. 34 ›› Issue (5) : 764-767.

Effect of substrate temperature on alumina thin films prepared by electron beam evaporation

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