A new zooming method for projection imaging lithography

RAN Zuo;ZHOU Jin-yun;LEI Liang;ZHOU Ya-mei;DENG Ya-fei

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2013, Vol. 34 ›› Issue (3) : 430-435.

A new zooming method for projection imaging lithography

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