Miniaturization noncontact online testing of sphericity interferometer system

LIN Jian;WANG Min;HAN Zhen-hua;ZHUO Jin-zhai

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2012, Vol. 33 ›› Issue (6) : 1053-1057.

Miniaturization noncontact online testing of sphericity interferometer system

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