Ion beam polishing with scanning mode of rectangular coordinates in polar coordinates system

GUO Wei-yuan;CHENG Xian-kai

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2012, Vol. 33 ›› Issue (1) : 164-169.

Ion beam polishing with scanning mode of rectangular coordinates in polar coordinates system

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