Ellipsometric study of TiAlON-based film

LIU Wen-de;CHEN Chi;DU Miao;HAO Lei;XU Ying-ying;FAN Qi-ming;ZHANG Jing

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2011, Vol. 32 ›› Issue (6) : 1202-1205.

Ellipsometric study of TiAlON-based film

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