A kind of anti-reflection (AR) coating with simple structure applicable in visible bands was designed. The characteristics of the AR-coatings were investigated by using the effective medium theory (EMT). The antireflective characteristics of 4 different substrate materials were compared and the polymethylmethacrylate (PMMA) was chosen for substrate to analyze the influences of the duty cycle, etching depth, incident wavelength and incident angle on the reflectivity of the groove phase grating. A set of parameters in the visible waveband of light are given. The research results show that the reflectivity is less than 2% in the waveband from 0.4 m to 0.55 m at the incident angle less than 30; the reflectivity is less than 2% in the waveband from 0.4 m to 0.8 m at the incident angle less than 10.
Key words
effective medium theory /
rectangular groove /
gratings /
anti-reflection coatings /
etching depth /
duty cycle
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References
[1]STRONG J. On a method of decreasing the reflection from non-metallic substances[J]. Journal of the Optical Society of America, 1936, 26(1): 73-74.
[2]DOS SANTOS J M, BERNARDO L M. Antireflection structures with use of multilevel subwavelength zero-order gratings[J]. Applied Optics, 1997, 36(34): 8935-8937.
[3]RAGUIN D H, MORRIS G M. Analysis of antireflection-structured surfaces with continuous one-dimensional surface profiles[J]. Applied Optics, 1993, 32(14): 2582-2583.
[4]WARREN M E, SMITH E, VAWTER G A, et al.High efficiency subwavelength diffractive optical element in GaAs for 975nm[J]. Optics Letters, 1995, 20(12): 1441-1443.
[5]GRANN E B, MOHARAM M G, POMMET D A. Artificial uniaxial and biaxial dielectrics with use of two-dimensional subwavelength binary gratings[J]. Journal of the Optical Society of America A, 1994, 11(10): 2695-2703.
[6]张亮, 李承芳, 张飞. 一维金属亚波长周期光栅的
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