Characterization of 1 064 nm laser induced damagein ALD optical film

LIU Zhi-chao;WEI Yao-wei;CHEN Song-lin;MA Ping

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2011, Vol. 32 ›› Issue (2) : 373-376.

Characterization of 1 064 nm laser induced damagein ALD optical film

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