Ion beam neutralization of broad beam cold cathode ion source

MI Qian;GU Ke-yi;QIN Ying

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2009, Vol. 30 ›› Issue (2) : 215-219.

Ion beam neutralization of broad beam cold cathode ion source

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