Sensitivity analysis of ellipsometric parameters in ellipsometric spectral measurement

HUANG Shui-hua;ZHOU Quan;TAN Ji-chun

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2009, Vol. 30 ›› Issue (1) : 84-88.

Sensitivity analysis of ellipsometric parameters in ellipsometric spectral measurement

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2009, 30(1): 84-88

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