Measuring thin-film thickness with phase-shift interferometry

SHI Yi-lei;SU Jun-hong;YANG Li-hong;XU Jun-qi

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2009, Vol. 30 ›› Issue (1) : 76-79.

Measuring thin-film thickness with phase-shift interferometry

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2009, 30(1): 76-79

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