Relation between ultra-smooth surface formation and polishing time

WANG Song-wei;YAO He-bao;JIANG Jun-biao;HU Zhi-qiang

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2008, Vol. 29 ›› Issue (5) : 705-707.

Relation between ultra-smooth surface formation and polishing time

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