Study on surface roughness of ZrO2 thin films

PAN Yong-qiang;WU Zhen-sen;HANG Ling-xia;LUO Ting

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2008, Vol. 29 ›› Issue (4) : 606-609.

Study on surface roughness of ZrO2 thin films

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