Measurement of linear expansion coefficient of silicon in high temperature with laser interferometric dilatometer

WANG Jian-hua;FAN Kai-guo;LIU Zhi-feng;SUN Jian-ping;ZHANG Jin-tao;WANG Zhe

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2007, Vol. 28 ›› Issue (5) : 645-648.

Measurement of linear expansion coefficient of silicon in high temperature with laser interferometric dilatometer

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