Shaped annular beam differential confocal measurement with higher spatial resolution

FENG Zheng-de;ZHAO Wei-qian;QIU Li-rong

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2007, Vol. 28 ›› Issue (4) : 488-495.

Shaped annular beam differential confocal measurement with higher spatial resolution

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