The influence of deposition parameters on chemical structure and optical properties of silicon carbonitride film

PIAO Yong;LIANG Hong jun;GAO Peng;DING Wan-yu;LU Wen-qi;MA Tengcai;XU Jun

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2006, Vol. 27 ›› Issue (4) : 274-280.

The influence of deposition parameters on chemical structure and optical properties of silicon carbonitride film

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