Calculation method of predictive model for residual stress distribution in optical thin films

ZHANG Yao-ping;XU Hong;LING Ning;ZHANG Yun-dong

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2006, Vol. 27 ›› Issue (2) : 108-111.

Calculation method of predictive model for residual stress distribution in optical thin films

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