PSD analysis and control strategy of optical component polishing

WANG Zhibin;TIAN Yao;SUN Pengcheng;ZHANG Zheng;ZHANG Feng;ZHANG Yunlong;JIAO Mingyin

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2022, Vol. 43 ›› Issue (4) : 772-779. DOI: 10.5768/JAO202243.0405004

PSD analysis and control strategy of optical component polishing

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2022, 43(4): 772-779 https://doi.org/10.5768/JAO202243.0405004

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