Defect detection algorithm of MEMS acoustic film based on frequency domain transformation

WEI Dong;SANG Mei;YU Minhui;HUANG Yaokang;LIU Hongguang;LIU Tiegen

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2021, Vol. 42 ›› Issue (6) : 1086-1091. DOI: 10.5768/JAO202142.0603005

Defect detection algorithm of MEMS acoustic film based on frequency domain transformation

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2021, 42(6): 1086-1091 https://doi.org/10.5768/JAO202142.0603005

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