Multi-degree of freedom acquisition system based on wide-spectrum phase-shifting interferometry

CAI Yawen;ZHANG Qingjun;LIU Jie;ZHANG Yue;LIU Jiuli

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2021, Vol. 42 ›› Issue (5) : 775-781. DOI: 10.5768/JAO202142.0501003

Multi-degree of freedom acquisition system based on wide-spectrum phase-shifting interferometry

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2021, 42(5): 775-781 https://doi.org/10.5768/JAO202142.0501003

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