Defect detection of micro-cantilever beams based on optical coherence vibrometer system

JIA Meiying;ZHONG Shuncong;ZHOU Ning;LIN Jiewen;ZHANG Qiukun

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2021, Vol. 42 ›› Issue (2) : 304-309. DOI: 10.5768/JAO202142.0203003

Defect detection of micro-cantilever beams based on optical coherence vibrometer system

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