Simultaneous measurement sensor of temperature and stress based on UV lithography phase-shifted grating

HU Yaosheng;LI Hanyang

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2021, Vol. 42 ›› Issue (1) : 200-206. DOI: 10.5768/JAO202142.0108002

Simultaneous measurement sensor of temperature and stress based on UV lithography phase-shifted grating

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