Misalignment analysis of cylindrical outer surfaces in interferometric measurement

XU Shuai;HAN Sen;WU Quanying;ZHANG Linghua;WANG Quanzhao;CHEN Qiubai;WANG Yan

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2020, Vol. 41 ›› Issue (5) : 1005-1013. DOI: 10.5768/JAO202041.0503001

Misalignment analysis of cylindrical outer surfaces in interferometric measurement

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2020, 41(5): 1005-1013 https://doi.org/10.5768/JAO202041.0503001

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