Research on on-line correction technology of ruled grating curved error

YANG Chao;ZHOU Peng;ZHOU Runsen;GAO Xu;XUE Changxi

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2019, Vol. 40 ›› Issue (4) : 658-662. DOI: 10.5768/JAO201940.0403005

Research on on-line correction technology of ruled grating curved error

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2019, 40(4): 658-662 https://doi.org/10.5768/JAO201940.0403005

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