Laser alignment measurement method based on focusing objective and PSD

Zhang Yizhou;Lu Yuanfu;Chen Liangpei;She Rongbin;Ma Tianyue;Liu Xianming

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2017, Vol. 38 ›› Issue (2) : 327-330. DOI: 10.5768/JAO201738.0207004

Laser alignment measurement method based on focusing objective and PSD

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