Simulation analysis of influence of SiO2 on thermal stress distribution of multilayer GaN epitaxial wafer

Chen Jing;Cheng Hongchang;Wu Lingling;Feng Liu;Miao Zhuang

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2016, Vol. 37 ›› Issue (6) : 887-894. DOI: 10.5768/JAO201637.0603003

Simulation analysis of influence of SiO2 on thermal stress distribution of multilayer GaN epitaxial wafer

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