Removal function of annular polishing pad based on translation-rotation motion

Jia Yun-feng;Hong Ying

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2016, Vol. 37 ›› Issue (1) : 113-117. DOI: 10.5768/JAO201637.0105002

Removal function of annular polishing pad based on translation-rotation motion

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