Four-wavelength switching interference measurement system for surface topography

Yang Lian-gen;Yu Zai-xin;He Lang;Wang Xuan-ze

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2015, Vol. 36 ›› Issue (6) : 847-851. DOI: 10.5768/JAO201536.0601005

Four-wavelength switching interference measurement system for surface topography

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