Effect of ion source parameters on etching rate and surface roughness of benzocyclobutene

Bao Qiang;Liu Wei-guo;Cai Chang-long;Zhou Shun;Chen Zhi-li;Xi Ying-xue;Ji Jiao

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2015, Vol. 36 ›› Issue (5) : 795-798. DOI: 10.5768/JAO201536.0505001

Effect of ion source parameters on etching rate and surface roughness of benzocyclobutene

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2015, 36(5): 795-798 https://doi.org/10.5768/JAO201536.0505001

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