Influence of defects in HfO2 film on absorptance and LIDT measurements

Liu hao;Pan feng;Wei Yao-wei;Ma ping;Zhang Zhe;Zhang Qing-hua;Wu Qian

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    Published By: Journal of Applied Optics

    CN 61-1171/O4

Journal of Applied Optics ›› 2015, Vol. 36 ›› Issue (2) : 314-320. DOI: 10.5768/JAO201536.0207004

Influence of defects in HfO2 film on absorptance and LIDT measurements

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2015, 36(2): 314-320 https://doi.org/10.5768/JAO201536.0207004

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