Mid-spatial frequency(MSF) wavefront error leads to laser damage during the use of optics. Therefore the accurate evaluation and modification are necessary in manufacture. A unique way based on multi-sample analysis was proposed for error frequency. Several outstanding frequencies were found in every sampling direction. After eliminating with the help of these frequencies, along with certain sample direction, unqualified frequency errors in 0.041 7 mm-1, 0.085 8 mm-1,0.041 7 mm-1 were down to 23.9%, 18.3%, 29.2%,respectively, while the MSF in whole optic surface decreased to half. According to the method above, the uncertainty caused by directionality and regionality of MSF in optic surface can be restrained.
Key words
mid-spatial frequency error /
wavelet transform /
optic fabrication /
frequency extraction
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References
[1]Zhang Chunlai, Wang Zhiguo, Xiang Xia, et al. FDTD simulation in the vicinity of pit cracks on fused silica rear-surface[J]. Acta Physica Sinica, 2012, 61(11): 114210-1-10.
章春来, 王治国, 向霞, 等. 熔石英后表面坑点型划痕对光场调制的近场模拟[J]. 物理学报, 2012, 61(11): 114210-1-10.
[2]Aikens D M, Wolfe C R, Lawson J K. Use of power spectral density (PSD) functions in specifying optics for the National Ignition Facility[C].USA:International Society for Optics and Photonics, 1995.
[3]Liao D, Yuan Z, Tang C, et al. Mid-spatial frequency error (PSD-2) of optics induced during CCOS and full-aperture polishing[J]. Journal of the European Optical Society-Rapid Publications, 2013, 8:13031-13031.
[4]Liao D, Wang J, Zhao S, et al. Analysis of the optic/impurity-particle/pad interaction for reduction of scratches formed on optics during pad polishing[J]. Journal of Non-Crystalline Solids, 2014, 391: 96-100.
[5]Yang Zhi, Dai Yifan, Wang GuiLin. The u
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Footnotes
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