45°光纤微反射镜聚焦离子束加工及多轴位移检测研究
李俊;李嘉伟;张鼎博;刘旭;李阔;马天;王伟峰;翟小伟
Research on focused ion beam processing of 45˚ optical communication fiber mirror and multi-axis displacement detection
LI Jun;LI Jiawei;ZHANG Dingbo;LIU Xu;LI Kuo;MA Tian;WANG Weifeng;ZHAI Xiaowei
应用光学 . 2021, (3): 557 -564 .  DOI: 10.5768/JAO202142.0308001