Study on The Performance of PECVD Silicon Nitride Thin Films

Sponsored by:

Editor-In-Chief:

ISSN 2214-9147

Hosted By:

Published By: Defence Technology

CN

Defence Technology, a peer reviewed journal, is published monthly and aims to become the best international academic exchange platform for the research related to defence technology. It publishes orig...

Study on The Performance of PECVD Silicon Nitride Thin Films

Liu L.;Liu W.-G.;Cao N.;Cai C.-L.

Defence Technology . 2013, (2): 121 -126 . DOI: 10.1016/j.dt.2013.10.004