Study on The Performance of PECVD Silicon Nitride Thin Films

Liu L.;Liu W.-G.;Cao N.;Cai C.-L.

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    Published By: Defence Technology

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Defence Technology, a peer reviewed journal, is published monthly and aims to become the best international academic exchange platform for the research related to defence technology. It publishes orig...
Defence Technology ›› 2013, Vol. 9 ›› Issue (2) : 121-126. DOI: 10.1016/j.dt.2013.10.004
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Study on The Performance of PECVD Silicon Nitride Thin Films

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2013, 9(2): 121-126 https://doi.org/10.1016/j.dt.2013.10.004

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