基于容栅传感器的二维微小位移测量方法研究
王睿;李新娥;马铁华;杜红棉;陆阳洋
Two-dimensional Small Displacement Measurement Method Based on Capacitive Grating Sensor
WANG Rui;LI Xin'e;MA Tiehua;DU Hongmian;LU Yangyang
兵工学报
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2020, (7): 1441
-1448
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DOI: 10.3969/j.issn.1000-1093.2020.07.023