利用微机电系统（MEMS）表面微加工技术设计并制作了一种应用于无线电引信射频前端的CMOS兼容高Q值悬浮片上螺旋电感。电感的制作工艺在热预算和材料选择上均具有良好的CMOS兼容特性。通过采用铜金属悬浮线圈结构减小了片上螺旋电感损耗因素，显著提高了片上螺旋电感Q值。采用电磁场有限元分析软件HFSS对该电感模型进行了仿真研究，完成了悬浮片上螺旋电感的制备并进行了测量。测量结果表明：所设计的CMOS兼容MEMS悬浮片上螺旋电感Q值在1～7.6GHz测量频段均大于20，在7.4 GHz频段最大值达到了38.
Abstract
A COMS-compatible high Q-factor suspended on-chip spiral inductor used in the radio frequency front-end of radio fuze is designed and fabricated using the micro-electro-mechanical system (MEMS) surface-micromachining technology. The fabrication process of inductor is compatible with CMOS in the aspects of both thermal budget and materials. The loss factors of on-chip spiral inductor are reduced by using a suspended copper coil, and the Q-factor is significantly improved. The improved inductor model is analyzed by the electromagnetic finite element analysis software HFSS. The MEMS suspended on-chip inductor is measured. The measurement results show that the Q-factor of inductor is more than 20 in the frequency range of 1～7.6 GHz and reaches 38 at 7.4 GHz.
关键词
兵器科学与技术 /
微机电系统 /
CMOS兼容工艺 /
悬浮片上螺旋电感 /
Q值 /
无线电引信
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Key words
ordnance science and technology /
micro-electro-mechanical system /
COMS-compatible process /
suspended on-chip spiral inductor /
Q-factor /
radio fuze
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