工程陶瓷超精密镜面加工新方法的研究

于思远;林滨;李世杰;王忠琪

兵工学报 ›› 1997, Vol. 18 ›› Issue (2) : 143-147.

兵工学报 ›› 1997, Vol. 18 ›› Issue (2) : 143-147. DOI: 10.3969/j.issn.1000-1093.1997.02.011
论文

工程陶瓷超精密镜面加工新方法的研究

  • 于思远、林滨、李世杰、王忠琪
作者信息 +

A Study on New Mirror Machining of EngineeringCeramics

  • Yu Siyuan,Lin bin ,Li Shijie,et al.
Author information +
文章历史 +

摘要

介绍了一种工程陶瓷超精密镜面加工的新方法,即高速研磨和抛光新技术。通过大量的实验研究,将散粒磨料改为固结磨料研磨,从而提高了生产率,降低了加工成本,改善了表面质量。文中对高速抛光的机理进行了探讨。

Abstract

Introduces a new method of mirror machining of engineering ceramics , viz.,high speed lapping and polishing. Through a series of experiment research , the new technique using a lapping and polishing disc composed of many sintered synthetic diamond pellets in place of a disc with dispersed abrasive grains appreciably raised the grinding efficiency, reduced machining cost and improved the surface quality. The high speed polishing mechanism is analyzed.

关键词

超精磨片 / 累积去除 / 抛光片 / 光电子能谱

Key words

words micro-precision grinding disk / accumulative removal / polishing pellets / energy spectrum of optoelectron

引用本文

导出引用
于思远、林滨、李世杰、王忠琪. 工程陶瓷超精密镜面加工新方法的研究. 兵工学报. 1997, 18(2): 143-147 https://doi.org/10.3969/j.issn.1000-1093.1997.02.011
Yu Siyuan,Lin bin ,Li Shijie,et al.. A Study on New Mirror Machining of EngineeringCeramics. Acta Armamentarii. 1997, 18(2): 143-147 https://doi.org/10.3969/j.issn.1000-1093.1997.02.011

基金

国家自然科学基全资助项目

参考文献

[1] 林锦文.加工光学玻璃的金刚石趄精磨片.磨料磨具与磨削,1990 (2)
[2] 李川等.集成电路エ艺与XPS分析.LSI制造与测试,1990 (4): 24—28
[3] Yoshiharu Namba. Mechanism and some application of ultra-finishing. Annals of CIRP, 1978,27.511

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