不同结构绝对光栅尺的误码机制研究
韦青海;陈新;刘强;王晗;陈彬;房飞宇
Machine-made bit error mechanism of absolute grating scale in different structures
Wei Qing-hai;Chen Xin;Liu Qiang;Wang hang;Chen Bin;Fang Fei-yu
应用光学 . 2015, (1): 103 -108 .  DOI: 10.5768/JAO201536.0105003