PECVD技术制备单层光学薄膜抗激光损伤特性研究
李鹏;杭凌侠;徐均琪;李林军
Laser-induced damage resist properties of monolayer optical thin films prepared by PECVD technology
Li Peng;Hang Ling-xia;Xu Jun-qi;Li Lin-jun
应用光学 . 2015, (2): 206 -213 .  DOI: 10.5768/JAO201536.0201008