平转动运动方式下环形抛光盘的去除函数研究
贾云凤;洪鹰
Removal function of annular polishing pad based on translation-rotation motion
Jia Yun-feng;Hong Ying
应用光学 . 2016, (1): 113 -117 .  DOI: 10.5768/JAO201637.0105002