MEMS光开关阵列的设计与应用
赵磊;王小齐;李晶娣;赵振海;柳华勃;马优恒
Design and application of MEMS optical switch array
Zhao Lei;Wang Xiaoqi;Li Jingdi;Zhao Zhenhai;Liu Huabo;Ma Youheng
应用光学 . 2016, (3): 452 -455 .  DOI: 10.5768/JAO201637.0305004