多频光栅物体高精度廓形三维测量及重建研究
虞梓豪;刘瑾;杨海马;李美莹;徐炜;徐斌
Research on 3D measurement and reconstruction of high-precision profile of multi-frequency grating object
YU Zihao;LIU Jin;YANG Haima;LI Meiying;XU Wei;XU Bin
应用光学 . 2020, (3): 580 -585 .  DOI: 10.5768/JAO202041.0303006