The ultra-precision diamond turning is a significant way to manufacture high- precision diffractive optical elements (DOE); however, this way is unable to achieve compensation machine currently that results in lower machining accuracy. Based on the study on the process of diamond turning and the compensation of surface shape error, and on the analysis of actual measurement data by the surface profile, the normal residual error was calculated between the actual turning curve and the ideal curve to get new machining trace of diamond turning in this paper. The compensation test on DOE of 78 with the diamond turning machine was done, and finally the value of peak value (PV) converges rapidly from 10.4 m to 4.3 m.
Zhang Feng, Wang Zhi-bin, Zhang Yun-long, Guo Xiao-gang, Su Ying, Guo Rui.
Diamond turning compensation techniques of diffractive optical elements. Journal of Applied Optics. 2014, 35(6): 1058-1062
基金
国防基础科研计划资助项目（A0920110019）
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参考文献
[1]Li Yingxuan.The diffractive optical element in the application of the optical system[J].Yun Guang Ji Shu，2002，34（3）：1-7. 李应选.衍射光学元件在光学系统中的应用[J].云光技术，2002，34（3）：1-7. [2]Zhang Jinliang，Li Junqi.The ultra-precision diamond turning technology[J].Journal of Applied Optics，2003，24（Sup.）：80-87. 张锦亮，李军琪.金刚石超精密切削加工技术[J].应用光学，2003，24（增刊）：80-87. [3]Blough C G, Rossi M, Mack S K, et al.Single-point diamond turning and replication of visible and near-infrared diffractive optical elements[J].Applied Optics, 1997, 36 (30)：4648-4654. [4]Liu Qingjing. The diamond turning in the application of the infrared-diffractive optical element manufacture[J].Journal of Laser and Infrared，2001，32(2)：107-109. 刘庆京.金刚石车削在红外衍射光学元件加工中的应用[J].激光与红外，2001，32(2)： 107-109. [5]
