二次非球面镜检测中基于波前等高线图的调整方法

晁格平;杨朋利;杨子建;付晓庆;王艳维

应用光学 ›› 2014, Vol. 35 ›› Issue (4) : 652-655.

应用光学 ›› 2014, Vol. 35 ›› Issue (4) : 652-655.

二次非球面镜检测中基于波前等高线图的调整方法

  • 晁格平,杨朋利,杨子建,付晓庆,王艳维
作者信息 +

Adjustment method of testing conic aspheric optical elements based on wavefront contour map

  • Chao Ge-ping,Yang Peng-li,Yang Zi-jian,Fu Xiao-qing,Wang Yan-wei
Author information +
文章历史 +

摘要

为了提高非球面光学元件的检测精度及效率,缩短调整环节的时间,分析了非球面干涉检测过程中被检非球面镜的调整误差对检测结果波前信息的影响,提出利用波前等高线图走势准确判断调整方向的调整方法。建立调整方向与被检镜失调量之间的关系,并利用光学设计软件Zemax仿真模拟检测光路,结合二次非球面镜的光学公差分析判断调整量的大小。基于该调整方法,利用Zygo激光干涉仪对口径为50 mm的双曲面进行检测,最终检测结果是RMS为0.014 ,实验表明该方法简单、可行。

Abstract

In order to improve the testing accuracy and efficiency of aspheric surface optical elements and reduce the adjusting time, the influence of adjustment error of testing elements in aspheric surface interference measurement on wavefront information of testing result was analyzed. The adjustment method which could judge the adjustment orientation accurately by taking advantage of the wavefront contour map trend was presented on this basis. The relation between adjustment orientation and alignment amount of testing elements was established. Using the optical design software Zemax,the measuring ray path of a conic aspheric surface was simulated, and the amount of adjustment was determined through analyzing the tolerance. According to this method, a hyperbolic mirror with an aperture of 50 mm was tested by Zygo laser interferometer, and the final testing result was 0.014 (RMS). Experiments show that the method is simple and feasible.

关键词

波前等高线 / 调整误差 / 二次非球面 / 光学检测

Key words

adjustment error / optical testing / wavefront contour / conic aspheric surface

引用本文

导出引用
晁格平, 杨朋利, 杨子建, 付晓庆, 王艳维. 二次非球面镜检测中基于波前等高线图的调整方法. 应用光学. 2014, 35(4): 652-655
Chao Ge-ping, Yang Peng-li, Yang Zi-jian, Fu Xiao-qing, Wang Yan-wei. Adjustment method of testing conic aspheric optical elements based on wavefront contour map. Journal of Applied Optics. 2014, 35(4): 652-655

参考文献

[1]Daniel M.Optical shop testing[M]. New York:Willy & Sons Inc,2007:435-439.
[2]Chen Qinfang. Study on the of off-axis mirrors test[D].Xi-an: Xi-an Institute of Optics and Precision Mechanics, 2011:1-11.
陈钦芳. 离轴非球面反射镜检测技术的研究[D].西安:中科院西安光学精密机械研究所,2011:1-11.
[3]Rimmer M. Analysis of perturbed lens systems[J].Applied Optics,1970,9(3):533-537.
[4]Zhang Min, Wang Lipeng, Sui Yongxin, et al. Separation of mechanical error in annular subaperture stitching interferometry[J].Journal of Applied Optics,2013,34(5):825-830.
张敏,王立朋,隋永新,等. 环形子孔径拼接检测中机械误差的分离[J].应用光学,2013,34(5):825-830.
[5]Cheng Haobo, Feng Zhijin. Error-seperation model for interferometric testing aspheric surfaces based on wavefront aberrations[J].Tsinghua Univ.:Sci. & Tech., 2006,46(2):187-190.
程灏波,冯之敬. 波像差

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