In order to improve the testing accuracy and efficiency of aspheric surface optical elements and reduce the adjusting time, the influence of adjustment error of testing elements in aspheric surface interference measurement on wavefront information of testing result was analyzed. The adjustment method which could judge the adjustment orientation accurately by taking advantage of the wavefront contour map trend was presented on this basis. The relation between adjustment orientation and alignment amount of testing elements was established. Using the optical design software Zemax,the measuring ray path of a conic aspheric surface was simulated, and the amount of adjustment was determined through analyzing the tolerance. According to this method, a hyperbolic mirror with an aperture of 50 mm was tested by Zygo laser interferometer, and the final testing result was 0.014 (RMS). Experiments show that the method is simple and feasible.
Chao Ge-ping, Yang Peng-li, Yang Zi-jian, Fu Xiao-qing, Wang Yan-wei.
Adjustment method of testing conic aspheric optical elements based on wavefront contour map. Journal of Applied Optics. 2014, 35(4): 652-655
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